Publication:
A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies
| dc.contributor.author | Hsu, B. | |
| dc.contributor.author | Syshchyk, O. | |
| dc.contributor.author | Vais, Abhitosh | |
| dc.contributor.author | Yu, Hao | |
| dc.contributor.author | Alian, AliReza | |
| dc.contributor.author | Mols, Yves | |
| dc.contributor.author | Vondkar Kodandarama, Komal | |
| dc.contributor.author | Kunert, Bernardette | |
| dc.contributor.author | Waldron, Niamh | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.imecauthor | Vais, Abhitosh | |
| dc.contributor.imecauthor | Yu, Hao | |
| dc.contributor.imecauthor | Alian, AliReza | |
| dc.contributor.imecauthor | Mols, Yves | |
| dc.contributor.imecauthor | Vondkar Kodandarama, Komal | |
| dc.contributor.imecauthor | Kunert, Bernardette | |
| dc.contributor.imecauthor | Waldron, Niamh | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.orcidimec | Vais, Abhitosh::0000-0002-0317-7720 | |
| dc.contributor.orcidimec | Yu, Hao::0000-0002-1976-0259 | |
| dc.contributor.orcidimec | Kunert, Bernardette::0000-0002-8986-4109 | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.date.accessioned | 2022-03-11T14:45:02Z | |
| dc.date.available | 2022-03-11T14:45:02Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/IRPS46558.2021.9405095 | |
| dc.identifier.eisbn | 978-1-7281-6893-7 | |
| dc.identifier.issn | 1541-7026 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39425 | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Reliability Physics Symposium (IRPS) | |
| dc.source.conferencedate | MAR 21-24, 2021 | |
| dc.source.conferencelocation | Virtual | |
| dc.source.journal | na | |
| dc.source.numberofpages | 5 | |
| dc.subject.keywords | LEVEL TRANSIENT SPECTROSCOPY | |
| dc.subject.keywords | RECOMBINATION | |
| dc.subject.keywords | TRAPS | |
| dc.title | A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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