Publication:

Radiation damage in shallow trench isolation diodes

Date

2001

Proceedings Paper

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Author(s)

Hayama, K.

;

Ohyama, H.

;

Miura, T.

;

Poyai, Amporn

;

;

Claeys, Cor

;

Kobayashi, K.

Statistics

1998 since deposited on 2021-10-14

Acq. date: 2026-06-17