Publication:
Compensating differences between measurement and calibration wafer in probe-tip calibrations
Date
| dc.contributor.author | Carchon, Geert | |
| dc.contributor.author | De Raedt, Walter | |
| dc.contributor.author | Beyne, Eric | |
| dc.contributor.imecauthor | De Raedt, Walter | |
| dc.contributor.imecauthor | Beyne, Eric | |
| dc.contributor.orcidimec | De Raedt, Walter::0000-0002-7117-7976 | |
| dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
| dc.date.accessioned | 2021-10-14T21:12:30Z | |
| dc.date.available | 2021-10-14T21:12:30Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6082 | |
| dc.source.beginpage | 1837 | |
| dc.source.conference | IEEE MTT-S International Microwave Symposium Digest | |
| dc.source.conferencedate | 2/06/2002 | |
| dc.source.conferencelocation | Seattle, WA USA | |
| dc.source.endpage | 1840 (Vol.3) | |
| dc.title | Compensating differences between measurement and calibration wafer in probe-tip calibrations | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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