Publication:
Limitations and strength of secondary ion mass spectrometry for semiconductor characterization: are we counting atoms on the nm-scale?
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-14T23:43:13Z | |
| dc.date.available | 2021-10-14T23:43:13Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6976 | |
| dc.source.conference | Symposium on In-line SIMS | |
| dc.source.conferencedate | 1/10/2002 | |
| dc.source.conferencelocation | Povo Italy | |
| dc.title | Limitations and strength of secondary ion mass spectrometry for semiconductor characterization: are we counting atoms on the nm-scale? | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
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