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A modified capacitance/voltage technique to characterize copper drift diffusion in organic low-K dielectrics
Publication:
A modified capacitance/voltage technique to characterize copper drift diffusion in organic low-K dielectrics
Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lanckmans, Filip
;
Geenen, Luc
;
Vandervorst, Wilfried
;
Maex, Karen
Journal
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1993
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations
Metrics
Views
1993
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations