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Investigation of the effect of the extension implant energy on deep submicron CMOS device perfomance
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Investigation of the effect of the extension implant energy on deep submicron CMOS device perfomance
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Date
1997
Proceedings Paper
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1943.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kubicek, Stefan
;
Biesemans, Serge
;
De Meyer, Kristin
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Acq. date: 2026-02-24
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Views
1877
since deposited on 2021-09-30
1
last month
Acq. date: 2026-02-24
Citations