Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Presentations
The sapphire surface structure and its impact on MOCVD grown wafer-scale MoS2 uniformity and MOSFET variability
Publication:
The sapphire surface structure and its impact on MOCVD grown wafer-scale MoS2 uniformity and MOSFET variability
Date
2019
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Shi, Yuanyuan
;
Groven, Benjamin
;
Serron, Jill
;
Han, Han
;
Banerjee, Sreetama
;
Wu, Xiangyu
;
Ludwig, Jonathan
;
Asselberghs, Inge
;
Lin, Dennis
;
Morin, Pierre
;
Caymax, Matty
;
Radu, Iuliana
Journal
Abstract
Description
Metrics
Views
2079
since deposited on 2021-10-27
Acq. date: 2025-10-23
Citations
Metrics
Views
2079
since deposited on 2021-10-27
Acq. date: 2025-10-23
Citations