Publication:
An Advanced Calibration Method for Modelling Oxidation and Mechanical Stress in Sub-Micron CMOS Isolation Structures
Date
| dc.contributor.author | Jones, S. K. | |
| dc.contributor.author | Poncet, A. | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Ahmed, M. | |
| dc.contributor.author | Rothwell, W. J. | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.date.accessioned | 2021-09-29T12:42:34Z | |
| dc.date.available | 2021-09-29T12:42:34Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/211 | |
| dc.source.beginpage | 877 | |
| dc.source.conference | International Electron Devices Meeting (IEDM). Technical Digest | |
| dc.source.conferencedate | 11/12/1994 | |
| dc.source.conferencelocation | San Francisco, Ca USA | |
| dc.source.endpage | 880 | |
| dc.title | An Advanced Calibration Method for Modelling Oxidation and Mechanical Stress in Sub-Micron CMOS Isolation Structures | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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