Publication:
Impact of the gate material on the deep levels in a-Si:H/c-SI metal-insulator-semiconductor capacitors
Date
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Ferro, Valentina | |
| dc.contributor.author | O'Sullivan, Barry | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.imecauthor | O'Sullivan, Barry | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.contributor.orcidimec | O'Sullivan, Barry::0000-0002-9036-8241 | |
| dc.date.accessioned | 2021-10-23T14:57:40Z | |
| dc.date.available | 2021-10-23T14:57:40Z | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27317 | |
| dc.identifier.url | http://www.scientific.net/SSP.242.61 | |
| dc.source.beginpage | 61 | |
| dc.source.conference | 16th Gettering and Defect Engineering in Semiconductors Conference - GADEST XVI | |
| dc.source.conferencedate | 20/09/2015 | |
| dc.source.conferencelocation | Bad Staffelstein Germany | |
| dc.source.endpage | 66 | |
| dc.title | Impact of the gate material on the deep levels in a-Si:H/c-SI metal-insulator-semiconductor capacitors | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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