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Design and characterisation of a CMOS compatible poly-SiGe low-g capacitive accelerometer
Publication:
Design and characterisation of a CMOS compatible poly-SiGe low-g capacitive accelerometer
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Date
2010
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wen, Lianggong
;
Haspeslagh, Luc
;
De Coster, Jeroen
;
Witvrouw, Ann
;
Puers, Bob
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1891
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Acq. date: 2025-12-10
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Metrics
Views
1891
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-10
Citations