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Deposition of O atomic layers on Si(100) substrates for epitaxial Si-O superlattices: investigation of the surface chemistry
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Deposition of O atomic layers on Si(100) substrates for epitaxial Si-O superlattices: investigation of the surface chemistry
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Date
2015
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jayachandran, Suseendran
;
Delabie, Annelies
;
Billen, Arne
;
Dekkers, Harold
;
Douhard, Bastien
;
Conard, Thierry
;
Meersschaut, Johan
;
Caymax, Matty
;
Vandervorst, Wilfried
;
Heyns, Marc
Journal
Applied Surface Science
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1956
since deposited on 2021-10-22
Acq. date: 2025-12-10
Citations
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Views
1956
since deposited on 2021-10-22
Acq. date: 2025-12-10
Citations