Publication:

Electrical characterization of 3D capacitor with carbon nanowalls as bottom electrode

Date

2012
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorQaid, Mohammad
dc.contributor.authorRadu, Iuliana
dc.contributor.authorCott, Daire
dc.contributor.authorAL-SALHI, Mohamad
dc.contributor.authorVereecken, Philippe
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned2021-10-20T14:57:09Z
dc.date.available2021-10-20T14:57:09Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21355
dc.source.conference4th International Conference NANOCON
dc.source.conferencedate23/10/2012
dc.source.conferencelocationBrno Czech Republic
dc.title

Electrical characterization of 3D capacitor with carbon nanowalls as bottom electrode

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions