Publication:
Fabrication of Pseudomorphic AlGaAs/InGaAs HEMTs Using CH4/H2 RIE for Gate Recessing
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1985 since deposited on 2021-09-29
Acq. date: 2026-05-18
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Statistics
Views
1985 since deposited on 2021-09-29
Acq. date: 2026-05-18
Citations