Publication:
Fabrication of Pseudomorphic AlGaAs/InGaAs HEMTs Using CH4/H2 RIE for Gate Recessing
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1984 since deposited on 2021-09-29
Acq. date: 2025-12-16
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Metrics
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1984 since deposited on 2021-09-29
Acq. date: 2025-12-16
Citations