Publication:
Establishing the relationship between low-k dielectric properties and intrinsic conduction and degradation mechanisms
Date
| dc.contributor.author | Wu, Chen | |
| dc.contributor.author | Li, Yunlong | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.imecauthor | Wu, Chen | |
| dc.contributor.imecauthor | Li, Yunlong | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.orcidimec | Wu, Chen::0000-0002-4636-8842 | |
| dc.contributor.orcidimec | Li, Yunlong::0000-0003-4791-4013 | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.date.accessioned | 2021-10-24T19:07:59Z | |
| dc.date.available | 2021-10-24T19:07:59Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/29949 | |
| dc.identifier.url | https://mrsspring.zerista.com/event/member/365550?embedded=1 | |
| dc.source.beginpage | ED.9.7.01 | |
| dc.source.conference | MRS Spring-Symposium ED9-Advanced Interconnects for Logic and Memory Applications - Materials, Processes and Integration | |
| dc.source.conferencedate | 17/04/2017 | |
| dc.source.conferencelocation | Phoenix, AZ USA | |
| dc.title | Establishing the relationship between low-k dielectric properties and intrinsic conduction and degradation mechanisms | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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