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Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low temperature
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Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low temperature
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Groven, Benjamin
;
Claes, Dieter
;
Nalin Mehta, Ankit
;
Bender, Hugo
;
Vandervorst, Wilfried
;
Heyns, Marc
;
Caymax, Matty
;
Radu, Iuliana
;
Delabie, Annelies
Journal
Journal of Chemical Physics
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1927
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Acq. date: 2026-01-06
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Views
1927
since deposited on 2021-10-27
2
last month
2
last week
Acq. date: 2026-01-06
Citations