Publication:

Opportunities and challenges for DSA in logic and memory

Date

2016
Meeting abstract
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dc.contributor.authorGronheid, Roel
dc.contributor.authorSingh, Arjun
dc.contributor.authorDoise, Jan
dc.contributor.authorBoeckx, Carolien
dc.contributor.authorKarageorgos, Ioannis
dc.contributor.authorRyckaert, Julien
dc.contributor.authorPathangi Sriraman, Hari
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorChan, BT
dc.contributor.authorVandenberghe, Geert
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-23T11:01:36Z
dc.date.available2021-10-23T11:01:36Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26667
dc.source.beginpage9777-25
dc.source.conferenceSPIE Advanced Lithography Conference
dc.source.conferencedate21/02/2016
dc.source.conferencelocationSan Jose, CA USA
dc.title

Opportunities and challenges for DSA in logic and memory

dc.typeMeeting abstract
dspace.entity.typePublication
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