Publication:
Impact of development chemistry on extreme ultraviolet resist performance
Date
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.date.accessioned | 2021-10-18T16:45:12Z | |
| dc.date.available | 2021-10-18T16:45:12Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 1071-1023 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17193 | |
| dc.source.beginpage | C6S1 | |
| dc.source.endpage | C6S5 | |
| dc.source.issue | 6 | |
| dc.source.journal | Journal of Vacuum Science and Technology B | |
| dc.source.volume | 28 | |
| dc.title | Impact of development chemistry on extreme ultraviolet resist performance | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |