Publication:
In-situ characterization of mechanical properties of MEMS structural layers using different test approaches, with application to thick poly-SiGe
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1895 since deposited on 2021-10-19
Acq. date: 2026-02-26
Citations
Statistics
Views
1895 since deposited on 2021-10-19
Acq. date: 2026-02-26
Citations