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Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster

Date

1998
Journal article
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dc.contributor.authorHemmes, K.
dc.contributor.authorHamstra, M. A.
dc.contributor.authorKoops, K. R.
dc.contributor.authorWind, M. M.
dc.contributor.authorSchram, Tom
dc.contributor.authorDe Laet, Jan
dc.contributor.authorBender, Hugo
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-09-30T12:09:05Z
dc.date.available2021-09-30T12:09:05Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2623
dc.source.beginpage40
dc.source.endpage46
dc.source.journalThin Solid Films
dc.source.volume313-14
dc.title

Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster

dc.typeJournal article
dspace.entity.typePublication
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