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SEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling Evaluation
Publication:
SEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling Evaluation
Date
2019
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ohashi, Takeyoshi
;
Hasumi, Kazuhisa
;
Masami, Ikota
;
Lorusso, Gian
;
Mertens, Hans
;
Witters, Liesbeth
;
Horiguchi, Naoto
Journal
Abstract
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1930
since deposited on 2021-10-27
Acq. date: 2025-10-23
Citations
Metrics
Views
1930
since deposited on 2021-10-27
Acq. date: 2025-10-23
Citations