Publication:
Integration issues of metal gate on high mobility substrates
Date
| dc.contributor.author | Biesemans, Serge | |
| dc.contributor.imecauthor | Biesemans, Serge | |
| dc.date.accessioned | 2021-10-15T04:01:31Z | |
| dc.date.available | 2021-10-15T04:01:31Z | |
| dc.date.issued | 2003-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7214 | |
| dc.source.conference | International Workshop on Metal Gate/Workfunction Engineering | |
| dc.source.conferencedate | 28/09/2003 | |
| dc.source.conferencelocation | Stanford, CA USA | |
| dc.title | Integration issues of metal gate on high mobility substrates | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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