Publication:

CMOS compatible SiGe micromirrors

Date

2011
Proceedings Paper
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dc.contributor.authorBeernaert, Roel
dc.contributor.authorAvci, Aykut
dc.contributor.authorDe Smet, Jelle
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDe Smet, Herbert
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Smet, Herbert
dc.date.accessioned2021-10-19T12:32:27Z
dc.date.available2021-10-19T12:32:27Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18539
dc.source.conferenceThe XXXI International Display Research Conference
dc.source.conferencedate19/09/2011
dc.source.conferencelocationBordeaux-Arcachon France
dc.title

CMOS compatible SiGe micromirrors

dc.typeProceedings paper
dspace.entity.typePublication
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