Publication:

Atomic layer deposition of gadolinium aluminate layers using Gd(iPrCp)3, TMA, and O3 or H2O

Date

2010
Journal article
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Author(s)

Adelmann, Christoph  
;
Pierreux, Dieter  
;
Swerts, Johan  
;
Dewulf, Daan
;
Hardy, An  
;
Tielens, Hilde  
;
Franquet, Alexis  
;
Brijs, Bert
;
Moussa, Alain  
;
Conard, Thierry  
;
Van Bael, Marlies  
;
Maes, Jan  
;
Jurczak, Gosia  
;
Kittl, Jorge
;
Van Elshocht, Sven  

Journal

Chemical Vapor Deposition

Abstract

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