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Presentations
Line edge roughness and its increasing importance
Publication:
Line edge roughness and its increasing importance
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ercken, Monique
;
Storms, Greet
;
Delvaux, Christie
;
Vandenbroeck, Nadia
;
Leunissen, Peter
;
Pollentier, Ivan
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1995
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1995
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-11
Citations