Atomic layer deposition of high-k dielectrics on sulphur-passivated germanium

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Author(s)

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Delabie, Annelies

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Conard, Thierry

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Franquet, Alexis

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Struyf, Herbert

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De Gendt, Stefan

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Fleischmann, Claudia

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Temst, Kristiaan

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Vantomme, Andre

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Muller, Matthias

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Beckhoff, Burkhard

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Journal

Journal of the Electrochemical Society

Metrics

1959 since deposited on 2021-10-19

Acq. date: 2025-10-23