Scale-up of a chemo-epitaxy flow for feature multiplication using directed self-assembly of block-copolymers

dc.contributor.author	Rincon Delgadillo, Paulina
dc.contributor.author	Craig, Gordon
dc.contributor.author	Gronheid, Roel
dc.contributor.author	Nealey, Paul
dc.contributor.imecauthor	Rincon Delgadillo, Paulina
dc.contributor.imecauthor	Gronheid, Roel
dc.date.accessioned	2021-10-21T11:23:36Z
dc.date.available	2021-10-21T11:23:36Z
dc.date.embargo	9999-12-31
dc.date.issued	2013
dc.identifier.issn	0914-9244
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/22995
dc.identifier.url	https://www.jstage.jst.go.jp/article/photopolymer/26/6/26_831/_article
dc.source.beginpage	831
dc.source.endpage	839
dc.source.issue	6
dc.source.journal	Journal of Photopolymer Science and Technology
dc.source.volume	26
dc.title	Scale-up of a chemo-epitaxy flow for feature multiplication using directed self-assembly of block-copolymers
dc.type	Journal article
dspace.entity.type	Publication
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