Publication:
The band structure of ALCVD AlZr- and AlHf-oxides as measured by XPS
Date
| dc.contributor.author | Petry, Jasmine | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-15T15:25:34Z | |
| dc.date.available | 2021-10-15T15:25:34Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9421 | |
| dc.source.beginpage | 56 | |
| dc.source.endpage | 59 | |
| dc.source.issue | 1_3 | |
| dc.source.journal | Materials Science and Engineering B | |
| dc.source.volume | 109 | |
| dc.title | The band structure of ALCVD AlZr- and AlHf-oxides as measured by XPS | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |