Publication:

Engineering Strain and Texture in Ferroelectric Scandium-Doped Aluminium Nitride

Date

2023
Journal article
https://doi.org/10.1021/acsaelm.2c01421
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dc.contributor.authorMcMitchell, Sean
dc.contributor.authorWalke, Amey
dc.contributor.authorBanerjee, Kaustuv
dc.contributor.authorMertens, Sofie
dc.contributor.authorPiao, Xiaoyu
dc.contributor.authorMao, Ming
dc.contributor.authorKatcko, Kostantine
dc.contributor.authorVellianitis, Georgios
dc.contributor.authorVan Dal, Mark
dc.contributor.authorLin, Yu-Ming
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorDelhougne, Romain
dc.contributor.authorKar, Gouri Sankar
dc.contributor.imecauthorMcMitchell, Sean
dc.contributor.imecauthorWalke, Amey
dc.contributor.imecauthorBanerjee, Kaustuv
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorPiao, Xiaoyu
dc.contributor.imecauthorMao, Ming
dc.contributor.imecauthorKatcko, Kostantine
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.orcidimecBanerjee, Kaustuv::0000-0001-8003-6211
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecKatcko, Kostantine::0000-0002-0576-8962
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.date.accessioned2023-07-24T11:44:50Z
dc.date.available2023-03-16T03:39:16Z
dc.date.available2023-07-06T07:43:37Z
dc.date.available2023-07-24T11:44:50Z
dc.date.issued2023
dc.identifier.doi10.1021/acsaelm.2c01421
dc.identifier.issn2637-6113
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41287
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage858
dc.source.endpage864
dc.source.issue2
dc.source.journalACS APPLIED ELECTRONIC MATERIALS
dc.source.numberofpages7
dc.source.volume5
dc.title

Engineering Strain and Texture in Ferroelectric Scandium-Doped Aluminium Nitride

dc.typeJournal article
dspace.entity.typePublication
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