Publication:
ALD La2O3 cap layers on high-k gates to modify the metal gate work function
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1938 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-08
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Metrics
Views
1938 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-08
Citations