Publication:
ALD La2O3 cap layers on high-k gates to modify the metal gate work function
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1939 since deposited on 2021-10-16
1last month
Acq. date: 2026-02-24
Citations
Statistics
Views
1939 since deposited on 2021-10-16
1last month
Acq. date: 2026-02-24
Citations