Publication:
Solvent diffusion in porous low-k dielectric films
Date
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T06:37:08Z | |
| dc.date.available | 2021-10-15T06:37:08Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8131 | |
| dc.source.beginpage | E9.11 | |
| dc.source.conference | Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics | |
| dc.source.conferencedate | 21/04/2004 | |
| dc.source.conferencelocation | San Fransisco, CA USA | |
| dc.title | Solvent diffusion in porous low-k dielectric films | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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