Publication:
Deposition of barrier materials for interconnects
Date
| dc.contributor.author | Van Elshocht, Sven | |
| dc.contributor.imecauthor | Van Elshocht, Sven | |
| dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
| dc.date.accessioned | 2021-10-20T17:39:46Z | |
| dc.date.available | 2021-10-20T17:39:46Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21698 | |
| dc.identifier.url | http://www.enhance-itn.eu/mam/content/pdf/winter2/brochure-enhance-winter_school__final.pdf | |
| dc.source.conference | Enhance Winter School | |
| dc.source.conferencedate | 9/01/2012 | |
| dc.source.conferencelocation | Helsinki finland | |
| dc.title | Deposition of barrier materials for interconnects | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |