Publication:

The importance of control over bubble size distribution in pulsed megasonic cleaning

Date

2012
Proceedings Paper
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dc.contributor.authorHauptmann, Marc
dc.contributor.authorStruyf, Herbert
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorGlorieux, Christ
dc.contributor.authorBrems, Steven
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorBrems, Steven
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.date.accessioned2021-10-20T11:31:33Z
dc.date.available2021-10-20T11:31:33Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20792
dc.source.beginpage299
dc.source.conferenceInternational Congress on Ultrasonics
dc.source.conferencedate5/09/2011
dc.source.conferencelocationGdansk Poland
dc.source.endpage303
dc.title

The importance of control over bubble size distribution in pulsed megasonic cleaning

dc.typeProceedings paper
dspace.entity.typePublication
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