Publication:
Low temperature investigation of n-channel GAA vertically stacked silicon nanosheets
| dc.contributor.author | Cretu, Bogdan | |
| dc.contributor.author | Veloso, Anabela | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.imecauthor | Veloso, Anabela | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2022-09-01T10:26:25Z | |
| dc.date.available | 2022-05-19T02:21:24Z | |
| dc.date.available | 2022-09-01T10:26:25Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/EuroSOI-ULIS53016.2021.9560692 | |
| dc.identifier.eisbn | 978-1-6654-3745-5 | |
| dc.identifier.issn | 2330-5738 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39841 | |
| dc.publisher | IEEE | |
| dc.source.conference | Joint International EUROSOI Workshop / International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) | |
| dc.source.conferencedate | SEP 01-03, 2021 | |
| dc.source.conferencelocation | Caen | |
| dc.source.journal | na | |
| dc.source.numberofpages | 4 | |
| dc.subject.keywords | LOW-FREQUENCY NOISE | |
| dc.title | Low temperature investigation of n-channel GAA vertically stacked silicon nanosheets | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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