Publication:
Current FeRAM technology developments and scaling towards 3-D capacitor cells
Date
| dc.contributor.author | Wouters, Dirk | |
| dc.date.accessioned | 2021-10-15T07:49:53Z | |
| dc.date.available | 2021-10-15T07:49:53Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8407 | |
| dc.source.beginpage | 28 | |
| dc.source.conference | Extended Abstracts of the 2003 International Conference on Solid State Device and Materials | |
| dc.source.conferencedate | 16/09/2003 | |
| dc.source.conferencelocation | Tokyo Japan | |
| dc.source.endpage | 29 | |
| dc.title | Current FeRAM technology developments and scaling towards 3-D capacitor cells | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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