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Conference contributions
Selective wet removal of the SiN contact etch stop layer prior to S/D contact formation
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Selective wet removal of the SiN contact etch stop layer prior to S/D contact formation
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Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pacco, Antoine
;
Holsteyns, Frank
;
Schaekers, Marc
;
Everaert, Jean-Luc
;
Dictus, Dries
;
Cuypers, Daniel
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2002
since deposited on 2021-10-26
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Acq. date: 2026-10-13
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2002
since deposited on 2021-10-26
1
last month
Acq. date: 2026-10-13
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