Publication:
Selective wet removal of the SiN contact etch stop layer prior to S/D contact formation
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1991 since deposited on 2021-10-26
3last month
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Acq. date: 2025-12-11
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Metrics
Views
1991 since deposited on 2021-10-26
3last month
2last week
Acq. date: 2025-12-11
Citations