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Selective wet removal of the SiN contact etch stop layer prior to S/D contact formation
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1988 since deposited on 2021-10-26
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Acq. date: 2025-10-25
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Metrics
Views
1988 since deposited on 2021-10-26
438item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations