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Room-temperature CO2 sensing using metal-insulator-semiconductor capacitors comprising atomic-layer-deposited La2O3 thin films

Date

2011
Journal article
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dc.contributor.authorKochupurackal, Jinesh
dc.contributor.authorDam, Van Anh
dc.contributor.authorSwerts, Johan
dc.contributor.authorde Nooijer, Christine
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorCrego-Calama, M.
dc.contributor.imecauthorDam, Van Anh
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorde Nooijer, Christine
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.accessioned2021-10-19T14:54:28Z
dc.date.available2021-10-19T14:54:28Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn0925-4005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19189
dc.source.beginpage276
dc.source.endpage282
dc.source.issue1
dc.source.journalSensors and Actuators B: Chemical
dc.source.volume156
dc.title

Room-temperature CO2 sensing using metal-insulator-semiconductor capacitors comprising atomic-layer-deposited La2O3 thin films

dc.typeJournal article
dspace.entity.typePublication
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