Publication:

Dissolution of germanium in sulfuric acid based solutions

Date

2015
Proceedings Paper
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dc.contributor.authorGan, Nobuko
dc.contributor.authorOgawa, Yuichi
dc.contributor.authorNagai, Tatsuo
dc.contributor.authorMasaoka, Toru
dc.contributor.authorWostyn, Kurt
dc.contributor.authorSebaai, Farid
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.date.accessioned2021-10-22T19:18:02Z
dc.date.available2021-10-22T19:18:02Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25284
dc.identifier.urlhttp://ecst.ecsdl.org/content/69/8/277.abstract
dc.source.beginpage277
dc.source.conference14th International Symposium On Semiconductor Cleaning Science And Technology - SCST 14
dc.source.conferencedate11/10/2015
dc.source.conferencelocationPhoenix, AZ USA
dc.source.endpage284
dc.title

Dissolution of germanium in sulfuric acid based solutions

dc.typeProceedings paper
dspace.entity.typePublication
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