Publication:

Low temperature anneal of the divacancy in p-type silicon

Date

1995
Proceedings Paper
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dc.contributor.authorTrauwaert, Marie-Astrid
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorMaes, Herman
dc.contributor.authorVan Bavel, Mieke
dc.contributor.authorLangouche, G.
dc.contributor.authorStesmans, Andre
dc.contributor.authorClauws, P.
dc.contributor.imecauthorVan Bavel, Mieke
dc.contributor.imecauthorStesmans, Andre
dc.date.accessioned2021-09-29T13:17:53Z
dc.date.available2021-09-29T13:17:53Z
dc.date.embargo9999-12-31
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/914
dc.source.beginpage953
dc.source.conferenceDefect- and Impurity-Engineered Semiconductors and Devices
dc.source.conferencedate17/04/1995
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpage958
dc.title

Low temperature anneal of the divacancy in p-type silicon

dc.typeProceedings paper
dspace.entity.typePublication
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