Publication:
Towards non-destructive carrier depth profiling
Date
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Bakshi, Mira | |
| dc.contributor.author | Nicolaides, Lena | |
| dc.contributor.author | Salnik, Alex | |
| dc.contributor.author | Opsal, John | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-16T00:59:36Z | |
| dc.date.available | 2021-10-16T00:59:36Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10240 | |
| dc.source.conference | 8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors | |
| dc.source.conferencedate | 5/06/2005 | |
| dc.source.conferencelocation | Daytona Beach, FL USA | |
| dc.title | Towards non-destructive carrier depth profiling | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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