Role of ruthenium texture and guanidine carbonate on chemical mechanical polishing of ruthenium films

dc.contributor.author	Amanapu, Hariprasad
dc.contributor.author	Sagi, Kaushik
dc.contributor.author	Teugels, Lieve
dc.contributor.author	Babu, S.V.
dc.contributor.imecauthor	Teugels, Lieve
dc.contributor.orcidimec	Teugels, Lieve::0000-0002-6613-9414
dc.date.accessioned	2021-10-21T06:42:33Z
dc.date.available	2021-10-21T06:42:33Z
dc.date.issued	2013
dc.identifier.issn	2162-8769
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/21974
dc.identifier.url	http://jss.ecsdl.org/content/2/11/P445.full.pdf+html
dc.source.beginpage	P445
dc.source.endpage	P451
dc.source.issue	11
dc.source.journal	ECS Journal of Solid State Science and Technology
dc.source.volume	2
dc.title	Role of ruthenium texture and guanidine carbonate on chemical mechanical polishing of ruthenium films
dc.type	Journal article
dspace.entity.type	Publication
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