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Thin SiGe films in narrow structures: comparison of different analysis techniques for the thickness and composition measurements
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Thin SiGe films in narrow structures: comparison of different analysis techniques for the thickness and composition measurements
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Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Franquet, Alexis
;
Conard, Thierry
;
Gilbert, Matthieu
;
Douhard, Bastien
;
Vandervorst, Wilfried
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1823
since deposited on 2021-10-20
Acq. date: 2025-12-15
Citations
Metrics
Views
1823
since deposited on 2021-10-20
Acq. date: 2025-12-15
Citations