Investigation on the drying dynamics of millimetric water droplets: source of watermarks on silicon wafers

dc.contributor.author	Belmiloud, Naser
dc.contributor.author	Tamaddon, Amir-Hossein
dc.contributor.author	Mertens, Paul
dc.contributor.author	Xu, XiuMei
dc.contributor.author	Struyf, Herbert
dc.contributor.imecauthor	Tamaddon, Amir-Hossein
dc.contributor.imecauthor	Mertens, Paul
dc.contributor.imecauthor	Xu, XiuMei
dc.contributor.imecauthor	Struyf, Herbert
dc.contributor.orcidimec	Tamaddon, Amir-Hossein::0000-0003-4566-0697
dc.contributor.orcidimec	Xu, XiuMei::0000-0002-3356-8693
dc.date.accessioned	2021-10-19T12:32:54Z
dc.date.available	2021-10-19T12:32:54Z
dc.date.embargo	9999-12-31
dc.date.issued	2011
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/18545
dc.source.beginpage	205
dc.source.conference	Semiconductor Cleaning Science and Technology 12 - SCST12
dc.source.conferencedate	9/10/2011
dc.source.conferencelocation	Boston, MA USA
dc.source.endpage	212
dc.title	Investigation on the drying dynamics of millimetric water droplets: source of watermarks on silicon wafers
dc.type	Proceedings paper
dspace.entity.type	Publication
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