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Conference contributions
Study of intrinsic low-k properties for interconnect scaling
Publication:
Study of intrinsic low-k properties for interconnect scaling
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Date
2010
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20431.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Larry
;
Baklanov, Mikhaïl
;
Pantouvaki, Marianna
;
Tokei, Zsolt
;
Beyer, Gerald
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1821
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations
Metrics
Views
1821
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations