Publication:

Study of intrinsic low-k properties for interconnect scaling

Date

2010

Meeting abstract

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Files

20431.pdf 42.94 KB

Author(s)

;

Baklanov, Mikhaïl

;

Pantouvaki, Marianna

;

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Statistics

1821 since deposited on 2021-10-19

Acq. date: 2026-02-24