Publication:
Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy
Date
| dc.contributor.author | Flannery, C. M. | |
| dc.contributor.author | Wittkowski, T. | |
| dc.contributor.author | Jung, K. | |
| dc.contributor.author | Hillebrands, B. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-14T21:37:36Z | |
| dc.date.available | 2021-10-14T21:37:36Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6324 | |
| dc.source.beginpage | 4594 | |
| dc.source.endpage | 4596 | |
| dc.source.issue | 24 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 80 | |
| dc.title | Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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