Publication:
ALD as key enabler for CMOS technology
Date
| dc.contributor.author | Van Elshocht, Sven | |
| dc.contributor.imecauthor | Van Elshocht, Sven | |
| dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
| dc.date.accessioned | 2021-10-26T06:49:52Z | |
| dc.date.available | 2021-10-26T06:49:52Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/32049 | |
| dc.source.conference | ALD for Industry. 2nd Workshop and Tutorial | |
| dc.source.conferencedate | 21/03/2018 | |
| dc.source.conferencelocation | Dresden Germany | |
| dc.title | ALD as key enabler for CMOS technology | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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