Publication:
The influence of gas damping on the harmonic and transient response of MEMS devices
Date
| dc.contributor.author | De Coster, Jeroen | |
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.author | Steeneken, P.G. | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.imecauthor | De Coster, Jeroen | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.date.accessioned | 2021-10-16T01:06:51Z | |
| dc.date.available | 2021-10-16T01:06:51Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10292 | |
| dc.source.beginpage | 300 | |
| dc.source.conference | 16th MicroMechanics Europe Workshop - MME | |
| dc.source.conferencedate | 4/09/2005 | |
| dc.source.conferencelocation | Goteborg Sweden | |
| dc.source.endpage | 303 | |
| dc.title | The influence of gas damping on the harmonic and transient response of MEMS devices | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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