Publication:
The importance of Cu in new generation process technologies
Date
| dc.contributor.author | Deferm, Ludo | |
| dc.contributor.imecauthor | Deferm, Ludo | |
| dc.date.accessioned | 2021-10-14T12:51:30Z | |
| dc.date.available | 2021-10-14T12:51:30Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4299 | |
| dc.source.beginpage | 233 | |
| dc.source.endpage | 235 | |
| dc.source.issue | 11 | |
| dc.source.journal | Semiconductor Fabtech | |
| dc.title | The importance of Cu in new generation process technologies | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |