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High Performing 8 Å EOT HfO2 / TaN Low Thermal-Budget n-channel FETs with Solid-Phase Epitaxially Regrown (SPER) Junctions
Publication:
High Performing 8 Å EOT HfO2 / TaN Low Thermal-Budget n-channel FETs with Solid-Phase Epitaxially Regrown (SPER) Junctions
Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ragnarsson, Lars-Ake
;
Severi, Simone
;
Trojman, Lionel
;
Brunco, David
;
Johnson, Kevin D.
;
Delabie, Annelies
;
Schram, Tom
;
Tsai, Wilman
;
Groeseneken, Guido
;
De Meyer, Kristin
;
De Gendt, Stefan
;
Heyns, Marc
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1902
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
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Views
1902
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations