Publication:
Scanning spreading resistance microscopy: high resolution two-dimensional carrier profiling of semiconductor structures
Date
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.imecauthor | Eyben, Pierre | |
| dc.contributor.thesisadvisor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-15T13:22:56Z | |
| dc.date.available | 2021-10-15T13:22:56Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2004-12 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8894 | |
| dc.title | Scanning spreading resistance microscopy: high resolution two-dimensional carrier profiling of semiconductor structures | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |