Publication:

Silver-assisted etching of silicon nanowires

Date

2011
Proceedings Paper
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dc.contributor.authorGielis, Sven
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVereecken, Philippe
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned2021-10-19T13:44:40Z
dc.date.available2021-10-19T13:44:40Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18957
dc.identifier.urlhttp://dx.doi.org/10.1149/1.3551490
dc.source.beginpage49
dc.source.conferenceElectroless Deposition Principles, Activation, and Applications
dc.source.conferencedate10/10/2010
dc.source.conferencelocationLas Vegas, NV USA
dc.source.endpage58
dc.title

Silver-assisted etching of silicon nanowires

dc.typeProceedings paper
dspace.entity.typePublication
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